Copiar de DEVELOPMENT AND CONTROL OF A NANO SERVO SYSTEM

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Copiar de DEVELOPMENT AND CONTROL OF A NANO SERVO SYSTEM by Mind Map: Copiar de DEVELOPMENT AND CONTROL OF A NANO SERVO SYSTEM

1. Motion system designed with simple operation conditions

1.1. DESIGN

1.1.1. .

1.1.1.1. A light source and a related optical system

1.1.1.2. a Blu-ray optical pickup unit

1.1.1.3. The multi-axis motion system

1.1.1.3.1. One is an XY nanopositioning stage

1.1.1.3.2. a nanometric motion qual-ity of the XY

2. STIFFNESS MODEL

2.1. establish the functional relationship between the force and dimensions

2.1.1. Modeling and analysis

2.1.2. Dynamic mode

2.1.2.1. .

3. FINITE ELEMENT ANALYSIS

3.1. Stiffness model validation

3.1.1. simulates the relationship between displacement and pushing force

3.1.1.1. .

3.2. Modal analysis

3.2.1. .

3.3. Validation of the redundant constraints module

3.3.1. Comparison of the performance of the proposed design with that of the same design in the absence of the redundant constraints module

3.3.1.1. .

4. REAL-TIME CONTROL SYSTEM

4.1. to control it requires a real-time control system based on feedback control

4.1.1. providing

4.1.1.1. improved dynamic performance

4.1.1.2. numerous control algorithms

4.1.1.3. disturbance observer

5. Experimental results

5.1. Two VCAs were utilized to actuate the servo stage

5.2. laser interferometer was used to sense and feedback the displacements

5.2.1. .

5.3. was used A feedback control strategy was employed by a self-designed rapid prototyping control system

5.3.1. .

5.4. user interface runs on the host computer

5.4.1. .